This fluid is also recommended for use in mechanical vacuum pumps where exposure to reactive gases is prevalent. In many instances HLT-20 has become the optimal selection for use in conjunction with applications such as: ion implantation, reactive plasma etching and LPCVD.
Single Stage: Single Stage Vacuum Pump oil is a high quality, straight mineral oil with extremely low vapor pressure qualities. Single Stage Vacuum Pump oil is recommended for absolute pressures from 760 millimeters of mercury down to the lowest pressures so far guaranteed for any commercial single stage mechanical pump, namely, 10 microns of mercury as measured by a McLeod gauge.
Fomblin Oil: Fomblin Oil is a totally inert vacuum pump oil used in high oxygen and/or corrosive environments. Fomblin is ideally suited for the harsh conditions encountered in semiconductor manufacturing operations. There are several viscosities of Fomblin YL-VAC available to meet most vacuum pump manufacturer’s requirements.
- High Temperature Oils
- 02 Service Oils
- Chemical Service Oils
- Synthetic Oils
- Mineral Oils
- Diffusion Pump Oils